Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Hoyong Park and Wonho Choe,Parametric study on excitation temperature and electron temperature in low pressure plasmas,Current Applied Physics,1567-1739,Elsevier BV,2010-11,10,6,1456-1460,https://cir.nii.ac.jp/crid/1362544418345179904,https://doi.org/10.1016/j.cap.2010.05.013