著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Kah-Yoong Chan and Teck-Yong Tou and Bee-San Teo,Effects of substrate temperature on electrical and structural properties of copper thin films,Microelectronics Journal,1879-2391,Elsevier BV,2006-09,37,9,930-937,https://cir.nii.ac.jp/crid/1362544418710953472,https://doi.org/10.1016/j.mejo.2006.01.011