著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Katsuhiko Murakami and Tetsuya Oshino and Hiroyuki Kondo and Hiroshi Chiba and Yoshio Kawabe and Takuro Ono and Noriaki Kandaka and Atsushi Yamazaki and Takashi Yamaguchi and Ryo Shibata and Masayuki Shiraishi,Development of EUV lithography tool technologies at Nikon,SPIE Proceedings,0277-786X,SPIE,2012-03-29,8322,,832215,https://cir.nii.ac.jp/crid/1362544420110351872,https://doi.org/10.1117/12.917676