著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Lei Shan and Joseph Levert and Lorne Meade and John Tichy and Steven Danyluk,Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing,Journal of Tribology,0742-4787,ASME International,1999-07-06,122,3,539-543,https://cir.nii.ac.jp/crid/1362825893434184064,https://doi.org/10.1115/1.555398