著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
J Garnaes and N Kofod and A Kühle and C Nielsen and K Dirscherl and L Blunt,Calibration of step heights and roughness measurements with atomic force microscopes,Precision Engineering,0141-6359,Elsevier BV,2003-01,27,1,91-98,https://cir.nii.ac.jp/crid/1362825893813922304,https://doi.org/10.1016/s0141-6359(02)00184-8