著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Jianqiang Han and Xinxin Li and Haifei Bao and Guomin Zuo and Yuelin Wang and Fei Feng and Zhenyin Yu and Xiaohong Ge,AFM probes fabricated with masked–maskless combined anisotropic etching and p<sup>+</sup>surface doping,Journal of Micromechanics and Microengineering,0960-1317,IOP Publishing,2005-12-22,16,2,198-204,https://cir.nii.ac.jp/crid/1362825894906240384,https://doi.org/10.1088/0960-1317/16/2/002