著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Axel Schindler and Thomas Haensel and Dieter Flamm and Wilfried Frank and Georg Boehm and Frank Frost and Renate Fechner and Frieder Bigl and Bernd Rauschenbach,<title>Ion beam and plasma jet etching for optical component fabrication</title>,SPIE Proceedings,0277-786X,SPIE,2001-11-09,4440,,217,https://cir.nii.ac.jp/crid/1362825895191508608,https://doi.org/10.1117/12.448043