著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
G. Cunge and D. Ferrah and C. Petit-Etienne and A. Davydova and H. Okuno and D. Kalita and V. Bouchiat and O. Renault,Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas,Journal of Applied Physics,0021-8979,AIP Publishing,2015-09-22,118,12,123302,https://cir.nii.ac.jp/crid/1362825895561412992,https://doi.org/10.1063/1.4931370