著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hidemichi Imai and Takeshi Kosuge and Kei Mesuda and Eiji Tsujimoto and Hideyoshi Takamizawa,Productivity improvement of high resolution inspection mode on TeraScan 597XR,SPIE Proceedings,0277-786X,SPIE,2010-04-29,7748,,77480Q,https://cir.nii.ac.jp/crid/1362825895606699904,https://doi.org/10.1117/12.867983