著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
M. Hiratani and T. Hamada and S. Iijima and Y. Ohji and I. Asano and N. Nakanishi and S. Kimura,A heteroepitaxial MIM-Ta/sub 2/O/sub 5/ capacitor with enhanced dielectric constant for DRAMs of G-bit generation and beyond,2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.01 CH37184),,Japan Soc. Appl. Phys,,,,41-42,https://cir.nii.ac.jp/crid/1363107368836789760,https://doi.org/10.1109/vlsit.2001.934937