著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
P Muralt,Ferroelectric thin films for micro-sensors and actuators: a review,Journal of Micromechanics and Microengineering,0960-1317,IOP Publishing,2000-05-23,10,2,136-146,https://cir.nii.ac.jp/crid/1363107368921052544,https://doi.org/10.1088/0960-1317/10/2/307