著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) M. A. Bogdanova and D. V. Lopaev and S. M. Zyryanov and A. T. Rakhimov,“Virtual IED sensor” at an rf-biased electrode in low-pressure plasma,Physics of Plasmas,1070-664X,AIP Publishing,2016-07-01,23,7,,https://cir.nii.ac.jp/crid/1363107369322816000,https://doi.org/10.1063/1.4956455