著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
K. Robbie and L. J. Friedrich and S. K. Dew and T. Smy and M. J. Brett,Fabrication of thin films with highly porous microstructures,"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films",0734-2101,American Vacuum Society,1995-05-01,13,3,1032-1035,https://cir.nii.ac.jp/crid/1363107369478624640,https://doi.org/10.1116/1.579579