著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Yang Ju and Tetsuya Kobayashi and Hitoshi Soyama,Fabrication of a GaAs Microwave Probe Used for Atomic Force Microscope,"ASME 2007 InterPACK Conference, Volume 1",,ASMEDC,2007-01-01,,,963-966,https://cir.nii.ac.jp/crid/1363107369895356160,https://doi.org/10.1115/ipack2007-33613