著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Raafat R. Mansour,RF MEMS-CMOS Device Integration: An Overview of the Potential for RF Researchers,IEEE Microwave Magazine,1527-3342,Institute of Electrical and Electronics Engineers (IEEE),2013-01,14,1,39-56,https://cir.nii.ac.jp/crid/1363107370226699136,https://doi.org/10.1109/mmm.2012.2226539