著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) J.F. Shepard and P.J. Moses and S. Trolier-McKinstry,The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films,Sensors and Actuators A: Physical,0924-4247,Elsevier BV,1998-11,71,1-2,133-138,https://cir.nii.ac.jp/crid/1363107370898755840,https://doi.org/10.1016/s0924-4247(98)00161-7