著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
K. Robbie and J. C. Sit and M. J. Brett,Advanced techniques for glancing angle deposition,"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",1071-1023,American Vacuum Society,1998-05-01,16,3,1115-1122,https://cir.nii.ac.jp/crid/1363388843438461824,https://doi.org/10.1116/1.590019