著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Ted Kamins,Polycrystalline Silicon for Integrated Circuit Applications,The Kluwer International Series in Engineering and Computer Science,0893-3405,Springer US,1988,,,,https://cir.nii.ac.jp/crid/1363388845482909952,https://doi.org/10.1007/978-1-4613-1681-7