著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
B. E. Deal and M. Sklar,Thermal Oxidation of Heavily Doped Silicon,Journal of The Electrochemical Society,0013-4651,The Electrochemical Society,1965,112,4,430,https://cir.nii.ac.jp/crid/1363388845872948992,https://doi.org/10.1149/1.2423562