著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
S. Chang and S. Sivoth,A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process,IEEE Electron Device Letters,0741-3106,Institute of Electrical and Electronics Engineers (IEEE),2006-11,27,11,905-907,https://cir.nii.ac.jp/crid/1363670318216655744,https://doi.org/10.1109/led.2006.884712