著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
K. Kuwabara and N. Sato and H. Morimura and J. Kodate and M. Nakamura and M. Ugajin and T. Kamei and K. Kudou and K. Machida and H. Ishii,Integrated MEMS LC Resonator with Sealed Air-Suspended Structure for Single-Chip RF LSIs,2007 IEEE International Electron Devices Meeting,,IEEE,2007,,,423-426,https://cir.nii.ac.jp/crid/1363670318263684992,https://doi.org/10.1109/iedm.2007.4418963