著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Tien-Syh Yang and Jir-Yon Lai and Ming-Show Wong and Chia-Liang Cheng,Substrate bias effect on the formation of nanocrystalline diamond films by microwave plasma-enhanced chemical vapor deposition,Journal of Applied Physics,0021-8979,AIP Publishing,2002-08-15,92,4,2133-2138,https://cir.nii.ac.jp/crid/1363670318965811456,https://doi.org/10.1063/1.1492864