Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ivan L. Berry and Keren J. Kanarik and Thorsten Lill and Samantha Tan and Vahid Vahedi and Richard A. Gottscho,Applying sputtering theory to directional atomic layer etching,"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films",0734-2101,American Vacuum Society,2017-12-15,36,1,1,https://cir.nii.ac.jp/crid/1363670319340644096,https://doi.org/10.1116/1.5003393