Sn O 2 target with controllable microstructure and thickness for generating extreme ultraviolet light
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- Chao Pan
- Southeast University State Key Laboratory of Bioelectronics, , Nanjing, Jiangsu 210096, China
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- Zhong-Ze Gu
- Southeast University State Key Laboratory of Bioelectronics, , Nanjing, Jiangsu 210096, China
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- Keiji Nagai
- Osaka University Institute of Laser Engineering, , Suita, Osaka 565-0871, Japan
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- Yoshinori Shimada
- Osaka University Institute of Laser Engineering, , Suita, Osaka 565-0871, Japan
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- Kazuhisa Hashimoto
- Osaka University Institute of Laser Engineering, , Suita, Osaka 565-0871, Japan
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- Tomoya Birou
- Osaka University Institute of Laser Engineering, , Suita, Osaka 565-0871, Japan
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- Takayoshi Norimatsu
- Osaka University Institute of Laser Engineering, , Suita, Osaka 565-0871, Japan
書誌事項
- 公開日
- 2006-07-01
- DOI
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- 10.1063/1.2213179
- 公開者
- AIP Publishing
この論文をさがす
説明
<jats:p>The target of weaved tin-oxide nanofibers were fabricated by electrospinning method. The microstructure, density, and thickness of the tin-oxide fibers could be well controlled by different fabrication condition. Extreme ultraviolet emission from Sn and SnO2 nanofibers was experimentally investigated. It was found that the microscopic structure of the target could have great affection on the extreme ultraviolet light emission.</jats:p>
収録刊行物
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- Journal of Applied Physics
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Journal of Applied Physics 100 (1), 016104-, 2006-07-01
AIP Publishing
