著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Chao Pan and Zhong-Ze Gu and Keiji Nagai and Yoshinori Shimada and Kazuhisa Hashimoto and Tomoya Birou and Takayoshi Norimatsu,Sn O 2 target with controllable microstructure and thickness for generating extreme ultraviolet light,Journal of Applied Physics,0021-8979,AIP Publishing,2006-07-01,100,1,016104,https://cir.nii.ac.jp/crid/1363670319374093440,https://doi.org/10.1063/1.2213179