著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
K Suzuki and K Nakamura and H Ohkubo and H Sugai,Power transfer efficiency and mode jump in an inductive RF discharge,Plasma Sources Science and Technology,0963-0252,IOP Publishing,1998-02-01,7,1,13-20,https://cir.nii.ac.jp/crid/1363670320116001920,https://doi.org/10.1088/0963-0252/7/1/003