Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
P.H Mayrhofer and F Kunc and J Musil and C Mitterer,A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings,Thin Solid Films,0040-6090,Elsevier BV,2002-08,415,1-2,151-159,https://cir.nii.ac.jp/crid/1363670320182486528,https://doi.org/10.1016/s0040-6090(02)00511-4