著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
M. Therasse and M. Benlahsen,Effects of deposition temperature on the structure of amorphous carbon nitride films,Solid State Communications,0038-1098,Elsevier BV,2004-01,129,2,139-142,https://cir.nii.ac.jp/crid/1363670320304635136,https://doi.org/10.1016/s0038-1098(03)00557-x