著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Y. Zhang and W. J. Weber and W. Jiang and A. Hallén and G. Possnert,Damage evolution and recovery on both Si and C sublattices in Al-implanted 4H–SiC studied by Rutherford backscattering spectroscopy and nuclear reaction analysis,Journal of Applied Physics,0021-8979,AIP Publishing,2002-05-15,91,10,6388-6395,https://cir.nii.ac.jp/crid/1363670320379686272,https://doi.org/10.1063/1.1469204