Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering
書誌事項
- 公開日
- 2006-07
- 権利情報
-
- https://www.elsevier.com/tdm/userlicense/1.0/
- DOI
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- 10.1016/j.mseb.2006.03.036
- 公開者
- Elsevier BV
この論文をさがす
収録刊行物
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- Materials Science and Engineering: B
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Materials Science and Engineering: B 131 (1-3), 62-71, 2006-07
Elsevier BV
