著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
K. Chu and P.W. Shum and Y.G. Shen,"Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering",Materials Science and Engineering: B,0921-5107,Elsevier BV,2006-07,131,1-3,62-71,https://cir.nii.ac.jp/crid/1363670320666914560,https://doi.org/10.1016/j.mseb.2006.03.036