著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Yangmin Li and Qingsong Xu,A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation,IEEE Transactions on Automation Science and Engineering,1545-5955,Institute of Electrical and Electronics Engineers (IEEE),2011-04,8,2,265-279,https://cir.nii.ac.jp/crid/1363670320928056320,https://doi.org/10.1109/tase.2010.2077675