著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Martin Lapisa and Göran Stemme and Frank Niklaus,"Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS",IEEE Journal of Selected Topics in Quantum Electronics,1077-260X,Institute of Electrical and Electronics Engineers (IEEE),2011-05,17,3,629-644,https://cir.nii.ac.jp/crid/1363951794229476480,https://doi.org/10.1109/jstqe.2010.2093570