著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
S. Trolier-McKinstry and P. Muralt,Thin Film Piezoelectrics for MEMS,Journal of Electroceramics,1385-3449,Springer Science and Business Media LLC,2004-01,12,1/2,7-17,https://cir.nii.ac.jp/crid/1363951794973492224,https://doi.org/10.1023/b:jecr.0000033998.72845.51