著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
M Boulouz and A Boulouz and A Giani and A Boyer,Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering,Thin Solid Films,0040-6090,Elsevier BV,1998-06,323,1-2,85-92,https://cir.nii.ac.jp/crid/1364233268323706880,https://doi.org/10.1016/s0040-6090(97)01053-5