著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Maïté Volatier and David Duchesne and Roberto Morandotti and Richard Arès and Vincent Aimez,Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation,Nanotechnology,0957-4484,IOP Publishing,2010-03-08,21,13,134014,https://cir.nii.ac.jp/crid/1364233268454852480,https://doi.org/10.1088/0957-4484/21/13/134014