著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Bongsang Kim and Matthew A. Hopcroft and Rob N. Candler and Chandra Mohan Jha and Manu Agarwal and Renata Melamud and Saurabh A. Chandorkar and Gary Yama and Thomas W. Kenny,Temperature Dependence of Quality Factor in MEMS Resonators,Journal of Microelectromechanical Systems,1057-7157,Institute of Electrical and Electronics Engineers (IEEE),2008-06,17,3,755-766,https://cir.nii.ac.jp/crid/1364233270293941120,https://doi.org/10.1109/jmems.2008.924253