著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
F. Rubio and J. M. Albella and J. Denis and J. M. Martinez-Duart,Optical properties of reactively sputtered Ta2O5 films,Journal of Vacuum Science and Technology,0022-5355,American Vacuum Society,1982-11-01,21,4,1043-1045,https://cir.nii.ac.jp/crid/1364233270693493504,https://doi.org/10.1116/1.571862