Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Kiyotaka Wasa and Tomoaki Matsushima and Hideaki Adachi and Isaku Kanno and Hidetoshi Kotera,Thin-Film Piezoelectric Materials For a Better Energy Harvesting MEMS,Journal of Microelectromechanical Systems,1057-7157,Institute of Electrical and Electronics Engineers (IEEE),2012-04,21,2,451-457,https://cir.nii.ac.jp/crid/1364233271047219968,https://doi.org/10.1109/jmems.2011.2181156