Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Alexander V. Pogudkin and Ivan A. Belyakov and Dmitry V. Vertyanov and Sergei M. Kruchinin and Sergei P. Timoshenkov,Research of Reconstructed Wafer Surface Planarity on the Metall-Compound-Silicon Boundary for Multi-Chip Module with Embedded Dies,2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus),,IEEE,2019-01,,,2008-2012,https://cir.nii.ac.jp/crid/1364233271156354816,https://doi.org/10.1109/eiconrus.2019.8657106