著者名,タイトル,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kamei,TDDB lifetime enhancement of high-k MOSFETs damaged by plasma processing—conflicting results in plasma charging damage evaluation,,,,2014,,,43,https://cir.nii.ac.jp/crid/1370288394362395010,