[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Nitriding Mechanism of Titanium Thin Films by Ion Implantation

Bibliographic Information

Other Title
  • イオン注入法によるチタン薄膜の窒化機構
  • サイキン ノ ケンキュウ イオン チュウニュウホウ ニ ヨル チタン ハクマク ノ チッカ キコウ

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Journal

  • Materia Japan

    Materia Japan 45 (1), 23-31, 2006

    The Japan Institute of Metals and Materials

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