Nitriding Mechanism of Titanium Thin Films by Ion Implantation
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- Kasukabe Yoshitaka
- Center for Internatinal Exchange, Tohoku University Department of Metallurgy, Tohoku University
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- Wang Jianjun
- Department of Metallurgy, Tohoku University
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- Yamamura Tutomu
- Department of Metallurgy, Tohoku University
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- Fujino Yutaka
- Center for Internatinal Exchange, Tohoku University
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- Yamamoto Shunya
- Quantum Beam Science Directorate, Japan Atomic Energy Agency
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- Yoshikawa Masato
- Quantum Beam Science Directorate, Japan Atomic Energy Agency
Bibliographic Information
- Other Title
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- イオン注入法によるチタン薄膜の窒化機構
- サイキン ノ ケンキュウ イオン チュウニュウホウ ニ ヨル チタン ハクマク ノ チッカ キコウ
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Journal
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- Materia Japan
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Materia Japan 45 (1), 23-31, 2006
The Japan Institute of Metals and Materials