Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
YAMASHITA Mutsuo,High-Rate Sputtering Apparatus by use of High-Frequency Discharge Plasma,Shinku,05598516,The Vacuum Society of Japan,2001,44,5,512-519,https://cir.nii.ac.jp/crid/1390001204063301120,https://doi.org/10.3131/jvsj.44.512