Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
TANAKA Kunihito and KOGOMA Masuhiro,Plasma Deposition of Fluorinated Polymers at Atmospheric Pressure,Shinku,05598516,The Vacuum Society of Japan,2002,45,2,80-84,https://cir.nii.ac.jp/crid/1390001204063358720,https://doi.org/10.3131/jvsj.45.80