Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
IWAMOTO Masayuki and KUWANO Yukinori,Fabricaiton method of amorphous silicon and its application.,Shinku,05598516,The Vacuum Society of Japan,1987,30,12,1037-1042,https://cir.nii.ac.jp/crid/1390001204063497600,https://doi.org/10.3131/jvsj.30.1037