Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
YAMANE Miyuki and KAWADA Hiroki and KITSUNAI Hiroyuki and TSUMAKI Nobuo and YAMASHITA Manabu and SUZUKI Shinichi,In Situ Analysis of Incident Ions on Chamber Surface in Electron Cyclotron Resonance Etching.,Shinku,05598516,The Vacuum Society of Japan,2000,43,8,812-816,https://cir.nii.ac.jp/crid/1390001204063518592,https://doi.org/10.3131/jvsj.43.812