Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
SHIGESATO Yuzo and ITO Norihiro and KON Masato and SONG Pun Kun,Targets for High Rate Reactive Sputtering. ITO Deposition by Reactive dc Magnetron Sputtering with Ozone Introduction.,Shinku,05598516,The Vacuum Society of Japan,2000,43,8,779-784,https://cir.nii.ac.jp/crid/1390001204063539968,https://doi.org/10.3131/jvsj.43.779