Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KUBO Takashi and TANAKA Makoto,Effects of Cathode Material on Capacitive Coupling RF Plasma.,Shinku,05598516,The Vacuum Society of Japan,2000,43,3,314-316,https://cir.nii.ac.jp/crid/1390001204063598592,https://doi.org/10.3131/jvsj.43.314