Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) KOKUBUN Kiyohide and HIRATA Masahiro and ONO Masatoshi and MURAKAMI Hiroshi and TODA Yoshitsugu,Quartz friction vacuum gauge and the theory of a viscosity vacuum gauge.,Shinku,05598516,The Vacuum Society of Japan,1987,30,9,706-714,https://cir.nii.ac.jp/crid/1390001204063821184,https://doi.org/10.3131/jvsj.30.706