Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) OISHI Toshiyuki and MIURA Naruhisa and SUITA Muneyoshi and NANJO Takuma and ABE Yuji and OZEKI Tatsuo and ISHIKAWA Hiroyasu and EGAWA Takashi,Zn Ion Implantation along the c Axis for Formation of Highly Resistive GaN Layers,Shinku,05598516,The Vacuum Society of Japan,2004,47,4,328-333,https://cir.nii.ac.jp/crid/1390001204063965952,https://doi.org/10.3131/jvsj.47.328